Phase structure and ferroelectric properties of BiFeO3 (BFO) films grown on Pt(111) buffered glass substrates at various growth temperatures and oxygen pressures have been studied. The optimization of the 20-nm-thick Pt(111) bottom electrode enables BFO films to form perovskite single phase structure at reduced temperatures between 400-500 °C. Microstructure of fine grains and smooth surface is obtained, which is favorable for applications. Multiferroic properties including 2Pr of 15.1-124 μC/cm 2, Ec of 351-680 kV/cm, and Ms of 5-8 emu/cm3 are achieved within the oxygen pressure range of 10-75 mTorr. The optimized ferroelectric properties are comparable to the reported values of BFO samples using Si and MgO single crystal substrates. The results of this study may broaden the possibility of the use of BFO films. ? 2013 American Institute of Physics.
